Air Products announced Wednesday that the company has signed a memorandum of understanding (MOU) with Ulsan, South Korea, to construct a nitrogen trifluoride (NF3) plant to support the fast growing Asian semiconductor and thin film transistor-liquid crystal display (TFT-LCD) markets.
The NF3 plant will be constructed at Air Products' existing specialty gas site in Ulsan. The first phase of the new plant will produce more than 500 metric tons per year and will be completed in late 2007.
NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices.
Air Products' bulk supply capabilities for NF3 will be further enhanced for the delivery of product to large volume flat panel and 300mm silicon semiconductor fabrication plants.