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Amtech, DSG Form Partnership To Manufacture Vertical Microwave Systems

Amtech will manufacture the vertical microwave systems through its Netherlands-based subsidiary, Tempress Systems.

TEMPE, Ariz. - Amtech Systems, Inc., a supplier of production and automation systems for manufacturing semiconductors, solar cells and wafers, announced Tuesday that it has entered into a manufacturing agreement with DSG Technologies (DSG), a Silicon Valley, California-based company, to manufacture a vertical microwave system, combining Amtech's vertical furnace platform with DSG's Micro-Mode Microwave (M3) heating technology.
Amtech, through its Netherlands-based subsidiary, Tempress Systems, will manufacture the vertical microwave system utilizing Tempress' small-batch vertical furnace platform and DSG's Axiom (300) reactor which utilizes the M3 microwave heating technology. This new product will be used for sub-50nm semiconductor device's curing processes: low-k dielectric, shallow-trench isolation, pre-metal dielectric, and polymide.
The agreement calls for Amtech and DSG to enter into a separate sales and service agreement granting Amtech exclusive rights for all of Europe and its existing customers worldwide.
The manufacturing agreement has an initial term of five years and provides for automatic one year renewals.