Cabot Microelectronics Corp. said Tuesday it will pursue legal action against DuPont Air Products NanoMaterials for the manufacturing and marketing of CMP slurries that infringe on patents held by Cabot. The DuPont products involved are those used for tungsten CMP.
“Cabot Microelectronics remains committed to the enforcement of our intellectual property and protection of our significant investment in patent-protected research and development,” said H. Carol Bernstein, Vice President, Secretary and General Counsel for Cabot.
DuPont filed a complaint on Dec. 8 with the U.S. District Court for the District of Arizona for declaratory relief and alleging non-infringement, invalidity and unenforceability of some of the Cabot patents in question.
The complaint was filed after Cabot refused to grant DuPont’s request to license Cabot’s patents. Cabot said it intends to file a counterclaim for patent infringement soon.
Cabot Microelectronics is a supplier of CMP slurries for semiconductor and data storage manufacturing.